Defay E Integration of Ferro and Piezoe Thin Films 2011 torrent

Textbook in PDF format

This book contains all the necessary knowledge to enable a complete understanding of how piezoelectric and ferroelectric thin films work, providing the key to integrating them into Microsystems. Topics covered include: deposition methods, contamination, key processes, and characterization. The basic concepts are detailed within a framework of thermodynamics: ferro-para phase transition, strain-stress relations, dielectric formalism, piezoelectricity, electrostriction and acoustics. An extended part of this book is dedicated to state-of-the-art applications in all fields of microsystems.
A major aspect is the approach it takes to the topic: it starts with complete descriptions of piezo- and ferro-films from basic concepts, in each case maintaining two different perspectives: on the one hand, microscopic models, and on the other hand, thermodynamics.
This book contains four parts. The first one is dedicated to concepts. It starts with the definitions and examples of what is piezo-pyro and ferroelectricity by considering the symmetry of the material. Thereafter, these properties are described within the framework of Thermodynamics. The second part described the way to integrate these materials in Microsystems. The third part is dedicated to characterization: composition, structure and a special focused on electrical behaviors. The last part gives a survey of state of the art applications using integrated piezo or/and ferroelectric films.
A separate chapter is devoted to electrostrictive thin films, with a special focus on tunable resonators - an area as yet unpublished in book form.
The exhaustive material in this book certainly makes it one of the most complete works on this topic, especially concerning acoustic resonators